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    UBMS® SERIES FOR DLC

    UnBalanced Magnetron Sputtering

    UBMS® series is batch system using Unbalanced Magnetron Sputtering method. Since this system can provide fine and high density films, it is suitable for lubrication film coating such as DLC and Molybdenum disulfide.

    1. Plasma density is increased near substrate by imbalanced magnetic field.
    2. Maximization of ion-assist effect.
    3. Control of Film Properties: Composition, Adhesion, Crystallization, Surface condition.
    Argon ion is activated in plasma and hits target.  > Activated argon ion sputters out metal atom from target.  > Film deposition is made with sputtered metal ion.

    Before
    After

    KOBELCO DLC Coating is excellent in wear resistance, low friction and toughness with Nano-multilayered structure.

    Well Balanced DLC Film

    Machine Lineup

    Production scale medium scale production large scale production
    Recommended
    Loading Space    		 φ 450mm
    x H 400mm
    or
    φ 130mm
    x H 400mm
    x 6 spindles    		 φ 700mm
    x H 800mm
    or
    φ 130mm
    x H 800mm
    x 12 spindles
    Sputtering Source 4 7
    Substrate Table 6-Spindles planetary rotary table 12-Spindles planetary rotary table

    Features of DLC by UBMS®

    DLC (Diamond-like carbon) has widespread applications such as car parts, mechanical components, dies, molds etc. because of its high mechanical hardness, chemical inertness, and low friction behavior. KOBELCO can offer optimized DLC for each customer’s target by tuning coating parameters.

    Applications of DLC and more

    • Automobile parts (engine parts/ fuel pump parts)
    • Mechanical parts (Ball bearing, ball screw, hydraulic pump parts)
    • Cutting tools for aluminum
    • Spinning tools for aluminum can
    • Trimming dies for SUS/Copper tube
    • Punches for SUS/aluminum sheet

    and more

    Advanced DLC by UBMS®

    • High Adhesion DLC
      • Ion assist effect by UBM
      • Optimized Interlayer
    • Hardness control and Multi-layer DLC
      • Ion assist effect by UBM
    • Metal-doped DLC
      • Co-sputter with metal target and carbon
    • Hydrogen content controlled DLC
      • Solid carbon source
    • Hybrid coating with AIP

    and more

    Effect of KOBELCO DLC

    BELCOATTM by UBMS®

    Name Type Hardness
    (Hv)    		 Thickness
    (μm)    		 Feature & Typical Applications
    BELCOAT
    B    		 Standard 1,500
    to
    2,500    		 0.5
    to
    5    		 Balance of Wear Resistance, Lubricity and Adhesion.Common Mechanical Component.
    BELCOAT
    HB    		 High
    Hardness    		 2,500
    to
    3,500    		 0.1
    to
    0.2    		 Focused on Wear Resistance Automotive Component Stamping Mold (For Non-Iron, Stainless Steel)
    BELCOAT
    UB    		 Ultra High
    Hardness    		 3,500
    to
    4,000    		 0.1
    to
    0.2    		 Focused on Wear Resistance Under High Pressure Automotive Component For Racing Use Cutting Tool(Non-Iron)
    BELCOAT
    NB    		 Nano-Multi
    Layer    		 1,500
    to
    2,500    		 0.1
    to
    0.15    		 Balance of Wear Resistance and Lubricity Toughness with Shock Resistant, Bearing, Punching Die
    BELCOAT
    MB    		 Metal Doped 1,000
    to
    2,000    		 0.15
    to
    0.25    		 Property Change by Metal Doping Relief of Film Stress Automotive Component, Plastic Injection Mold

    More Information
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